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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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低偏角碳化硅同质/异质外延生长研究
学位论文
, 北京: 中国科学院半导体研究所, 2016
Authors:
闫果果
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View/Download:620/25
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Submit date:2016/12/05
Growth of f4H-SiC epilayers with low surface roughness and morphological defects density on 4° off-axis substrates
期刊论文
Applied Surface Science, 2013, 卷号: 270, 页码: 301-306
Authors:
Dong, Lin
;
Sun, Guosheng
;
Yu, Jun
;
Zheng, Liu
;
Liu, Xingfang
;
Zhang, Feng
;
Yan, Guoguo
;
Li, Xiguang
;
Wang, Zhanguo
Adobe PDF(1164Kb)
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View/Download:502/160
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Submit date:2014/03/17
Growth of 4H-SiC epilayers with low surface roughness and morphological defects density on 4 degrees off-axis substrates
期刊论文
APPLIED SURFACE SCIENCE, 2013, 卷号: 270, 页码: 301-306
Authors:
Dong, Lin
;
Sun, Guosheng
;
Yu, Jun
;
Zheng, Liu
;
Liu, Xingfang
;
Zhang, Feng
;
Yan, Guoguo
;
Li, Xiguang
;
Wang, Zhanguo
Adobe PDF(1164Kb)
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View/Download:1094/363
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Submit date:2013/09/17
Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene-Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources
期刊论文
MATERIALS, 2013, 卷号: 6, 期号: 4, 页码: 1543-1553
Authors:
Liu, Xingfang
;
Sun, Guosheng
;
Liu, Bin
;
Yan, Guoguo
;
Guan, Min
;
Zhang, Yang
;
Zhang, Feng
;
Chen, Yu
;
Dong, Lin
;
Zheng, Liu
;
Liu, Shengbei
;
Tian, Lixin
;
Wang, Lei
;
Zhao, Wanshun
;
Zeng, Yiping
Adobe PDF(502Kb)
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View/Download:1245/294
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Submit date:2013/08/27
Development of vertical 32" LPCVD system for fast epitaxial growth on 4H-SiC
期刊论文
Materials Science Forum, 2012, 卷号: 717-720, 页码: 105-108
Authors:
Zhao, Wanshun
;
Sun, Guosheng
;
Wu, Hailei
;
Yan, Guoguo
;
Zheng, Liu
;
Dong, Lin
;
Wang, Lei
;
Liu, Xingfang
;
Yang, Lijun
Adobe PDF(250Kb)
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View/Download:734/175
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Submit date:2013/04/22
Infrared reflectance study of 3C-SiC epilayers grown on silicon substrates
期刊论文
Journal of Physics D: Applied Physics, 2012, 卷号: 45, 期号: 24, 页码: 245102
Authors:
Dong, Lin
;
Sun, Guosheng
;
Zheng, Liu
;
Liu, Xingfang
;
Zhang, Feng
;
Yan, Guoguo
;
Zhao, Wanshun
;
Wang, Lei
;
Li, Xiguang
;
Wang, Zhanguo
Adobe PDF(654Kb)
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View/Download:703/154
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Submit date:2013/04/22
High-Performance 4H-SiC-Based Metal-Insulator-Semiconductor Ultraviolet Photodetectors With SiO(2) and Al(2)O(3)/SiO(2) Films
期刊论文
IEEE ELECTRON DEVICE LETTERS, 2011, 卷号: 32, 期号: 12, 页码: 1722-1724
Authors:
Zhang F (Zhang Feng)
;
Sun GS (Sun Guosheng)
;
Huang HL (Huang Huolin)
;
Wu ZY (Wu Zhengyun)
;
Wang L (Wang Lei)
;
Zhao WS (Zhao Wanshun)
;
Liu XF (Liu Xingfang)
;
Yan GG (Yan Guoguo)
;
Zheng L (Zheng Liu)
;
Dong L (Dong Lin)
;
Zeng YP (Zeng Yiping)
Adobe PDF(224Kb)
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View/Download:876/260
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Submit date:2012/02/22
High-Performance4H-SiC-based metal-insulator-semiconductor ultraviolet photodetectors with SiO2 and Al2O3SiO2 Films
期刊论文
IEEE Electron Device Letters, 2011, 卷号: 32, 期号: 12, 页码: 1722-1724
Authors:
Zhang, Feng
;
Sun, Guosheng
;
Huang, Huolin
;
Wu, Zhengyun
;
Wang, Lei
;
Zhao, Wanshun
;
Liu, Xingfang
;
Yan, Guoguo
;
Zheng, Liu
;
Dong, Lin
;
Zeng, Yiping
;
Zhang, F.(fzhang@semi.ac.cn)
Adobe PDF(234Kb)
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View/Download:1131/379
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Submit date:2012/06/14
Integrated Circuits
Metal Insulator Boundaries
Photodetectors
Semiconducting Silicon Compounds
Semiconductor Insulator Boundaries
Silicon Carbide
Multi-wafer3C-SiC thin films grown on Si(100) in a vertical HWLPCVD reactor
期刊论文
Journal of Semiconductors, 2011, 卷号: 32, 期号: 6, 页码: 63001
Authors:
Yan, Guoguo
;
Sun, Guosheng
;
Wu, Hailei
;
Wang, Lei
;
Zhao, Wanshun
;
Liu, Xingfang
;
Zeng, Yiping
;
Wen, Jialiang
;
Yan, G.(ggyan@semi.ac.cn)
Adobe PDF(578Kb)
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View/Download:1165/326
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Submit date:2012/06/14
Chemical Vapor Deposition
Deposition
Electric Resistance
Epitaxial Growth
Film Growth
Sheet Resistance
Silicon Carbide
Silicon Wafers
宽禁带半导体碳化硅(SiC)生长工艺及多片大面积外延技术的研究
学位论文
, 北京: 中国科学院研究生院, 2011
Authors:
闫果果
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View/Download:1203/110
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Submit date:2011/06/01