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低偏角碳化硅同质/异质外延生长研究 学位论文
, 北京: 中国科学院半导体研究所, 2016
Authors:  闫果果
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Growth of f4H-SiC epilayers with low surface roughness and morphological defects density on 4° off-axis substrates 期刊论文
Applied Surface Science, 2013, 卷号: 270, 页码: 301-306
Authors:  Dong, Lin;  Sun, Guosheng;  Yu, Jun;  Zheng, Liu;  Liu, Xingfang;  Zhang, Feng;  Yan, Guoguo;  Li, Xiguang;  Wang, Zhanguo
Adobe PDF(1164Kb)  |  Favorite  |  View/Download：457/160  |  Submit date：2014/03/17
Growth of 4H-SiC epilayers with low surface roughness and morphological defects density on 4 degrees off-axis substrates 期刊论文
APPLIED SURFACE SCIENCE, 2013, 卷号: 270, 页码: 301-306
Authors:  Dong, Lin;  Sun, Guosheng;  Yu, Jun;  Zheng, Liu;  Liu, Xingfang;  Zhang, Feng;  Yan, Guoguo;  Li, Xiguang;  Wang, Zhanguo
Adobe PDF(1164Kb)  |  Favorite  |  View/Download：1037/363  |  Submit date：2013/09/17
Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene-Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources 期刊论文
MATERIALS, 2013, 卷号: 6, 期号: 4, 页码: 1543-1553
Authors:  Liu, Xingfang;  Sun, Guosheng;  Liu, Bin;  Yan, Guoguo;  Guan, Min;  Zhang, Yang;  Zhang, Feng;  Chen, Yu;  Dong, Lin;  Zheng, Liu;  Liu, Shengbei;  Tian, Lixin;  Wang, Lei;  Zhao, Wanshun;  Zeng, Yiping
Adobe PDF(502Kb)  |  Favorite  |  View/Download：1188/294  |  Submit date：2013/08/27
Development of vertical 32" LPCVD system for fast epitaxial growth on 4H-SiC 期刊论文
Materials Science Forum, 2012, 卷号: 717-720, 页码: 105-108
Authors:  Zhao, Wanshun;  Sun, Guosheng;  Wu, Hailei;  Yan, Guoguo;  Zheng, Liu;  Dong, Lin;  Wang, Lei;  Liu, Xingfang;  Yang, Lijun
Adobe PDF(250Kb)  |  Favorite  |  View/Download：686/175  |  Submit date：2013/04/22
Infrared reflectance study of 3C-SiC epilayers grown on silicon substrates 期刊论文
Journal of Physics D: Applied Physics, 2012, 卷号: 45, 期号: 24, 页码: 245102
Authors:  Dong, Lin;  Sun, Guosheng;  Zheng, Liu;  Liu, Xingfang;  Zhang, Feng;  Yan, Guoguo;  Zhao, Wanshun;  Wang, Lei;  Li, Xiguang;  Wang, Zhanguo
Adobe PDF(654Kb)  |  Favorite  |  View/Download：634/153  |  Submit date：2013/04/22
High-Performance 4H-SiC-Based Metal-Insulator-Semiconductor Ultraviolet Photodetectors With SiO(2) and Al(2)O(3)/SiO(2) Films 期刊论文
IEEE ELECTRON DEVICE LETTERS, 2011, 卷号: 32, 期号: 12, 页码: 1722-1724
Authors:  Zhang F (Zhang Feng);  Sun GS (Sun Guosheng);  Huang HL (Huang Huolin);  Wu ZY (Wu Zhengyun);  Wang L (Wang Lei);  Zhao WS (Zhao Wanshun);  Liu XF (Liu Xingfang);  Yan GG (Yan Guoguo);  Zheng L (Zheng Liu);  Dong L (Dong Lin);  Zeng YP (Zeng Yiping)
Adobe PDF(224Kb)  |  Favorite  |  View/Download：833/260  |  Submit date：2012/02/22
High-Performance4H-SiC-based metal-insulator-semiconductor ultraviolet photodetectors with SiO2 and Al2O3SiO2 Films 期刊论文
IEEE Electron Device Letters, 2011, 卷号: 32, 期号: 12, 页码: 1722-1724
Authors:  Zhang, Feng;  Sun, Guosheng;  Huang, Huolin;  Wu, Zhengyun;  Wang, Lei;  Zhao, Wanshun;  Liu, Xingfang;  Yan, Guoguo;  Zheng, Liu;  Dong, Lin;  Zeng, Yiping;  Zhang, F.(fzhang@semi.ac.cn)
Adobe PDF(234Kb)  |  Favorite  |  View/Download：1079/379  |  Submit date：2012/06/14
Integrated Circuits  Metal Insulator Boundaries  Photodetectors  Semiconducting Silicon Compounds  Semiconductor Insulator Boundaries  Silicon Carbide  
Multi-wafer3C-SiC thin films grown on Si(100) in a vertical HWLPCVD reactor 期刊论文
Journal of Semiconductors, 2011, 卷号: 32, 期号: 6, 页码: 63001
Authors:  Yan, Guoguo;  Sun, Guosheng;  Wu, Hailei;  Wang, Lei;  Zhao, Wanshun;  Liu, Xingfang;  Zeng, Yiping;  Wen, Jialiang;  Yan, G.(ggyan@semi.ac.cn)
Adobe PDF(578Kb)  |  Favorite  |  View/Download：1103/326  |  Submit date：2012/06/14
Chemical Vapor Deposition  Deposition  Electric Resistance  Epitaxial Growth  Film Growth  Sheet Resistance  Silicon Carbide  Silicon Wafers  
宽禁带半导体碳化硅(SiC)生长工艺及多片大面积外延技术的研究 学位论文
, 北京: 中国科学院研究生院, 2011
Authors:  闫果果
Adobe PDF(2242Kb)  |  Favorite  |  View/Download：1141/109  |  Submit date：2011/06/01