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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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The composition and interfacial properties of annealed AlN films deposited on 4H-SiC by atomic layer deposition
期刊论文
Materials Science in Semiconductor Processing, 2019, 卷号: 94, 页码: 107-115
Authors:
Jun Chen
;
Bowen Lv
;
Feng Zhang
;
Yinshu Wang
;
Xingfang Liu
;
Guoguo Yan
;
Zhanwei Shen
;
Zhengxin Wen
;
Lei Wang
;
Wanshun Zhao
;
Guosheng Sun
;
Chao Liu
;
Yiping Zeng
Adobe PDF(3762Kb)
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View/Download:22/0
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Submit date:2020/07/31
A Novel Silicon Carbide Accumulation Channel Injection Enhanced Gate Transistor With Buried Barrier Under Shielding Region
期刊论文
IEEE ELECTRON DEVICE LETTERS, 2017, 卷号: 38, 期号: 7, 页码: 941-944
Authors:
Zhengxin Wen
;
Feng Zhang
;
Member
;
IEEE
;
Zhanwei Shen
;
Lixin Tian
;
Guoguo Yan
;
Xingfang Liu
;
Lei Wang
;
Wanshun Zhao
;
Guosheng Sun
;
Yiping Zeng
Adobe PDF(1287Kb)
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View/Download:233/0
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Submit date:2018/06/01
低偏角碳化硅同质/异质外延生长研究
学位论文
, 北京: 中国科学院半导体研究所, 2016
Authors:
闫果果
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View/Download:612/25
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Submit date:2016/12/05
Effect of hydrogen flow on growth of 3C-SiC heteroepitaxial layers on Si(111) substrates
期刊论文
Applied Surface Science, 2015, 卷号: 353, 页码: 744-749
Authors:
Guoguo Yan
;
Feng Zhang
;
Yingxi Niu
;
Fei Yang
;
Xingfang Liu
;
Lei Wang
;
Wanshun Zhao
;
Guosheng Sun
;
Yiping Zeng
Adobe PDF(1567Kb)
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View/Download:280/2
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Submit date:2016/03/29
Ab initio theoretical and photoemission studies on formation of 4H-SiC(0001) SiO2 interface
期刊论文
Applied Surface Science, 2013, 卷号: 280, 页码: 500–503
Authors:
Liu Zheng, Guosheng Sun, Feng Zhang, Shengbei Liu , Bin Liu , Lin Dong, Lei Wang, Wanshun Zhao, Xingfang Liu , Guoguo Yan , Lixin Tian ,Yiping Zeng
Adobe PDF(1051Kb)
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Submit date:2014/03/26
Growth of f4H-SiC epilayers with low surface roughness and morphological defects density on 4° off-axis substrates
期刊论文
Applied Surface Science, 2013, 卷号: 270, 页码: 301-306
Authors:
Dong, Lin
;
Sun, Guosheng
;
Yu, Jun
;
Zheng, Liu
;
Liu, Xingfang
;
Zhang, Feng
;
Yan, Guoguo
;
Li, Xiguang
;
Wang, Zhanguo
Adobe PDF(1164Kb)
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View/Download:498/160
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Submit date:2014/03/17
Analysis and modeling of localized faceting on 4H-SiC epilayer surfaces
期刊论文
physica status solidi (a), 2013, 卷号: 210, 期号: 11, 页码: 2503–2509
Authors:
Lin Dong, Guosheng Sun, Liu Zheng, Xingfang Liu, Feng Zhang, Guoguo Yan, Lixin Tian, Xiguang Li, Zhanguo Wang
Adobe PDF(3414Kb)
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View/Download:361/57
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Submit date:2014/03/17
Growth of 4H-SiC epilayers with low surface roughness and morphological defects density on 4 degrees off-axis substrates
期刊论文
APPLIED SURFACE SCIENCE, 2013, 卷号: 270, 页码: 301-306
Authors:
Dong, Lin
;
Sun, Guosheng
;
Yu, Jun
;
Zheng, Liu
;
Liu, Xingfang
;
Zhang, Feng
;
Yan, Guoguo
;
Li, Xiguang
;
Wang, Zhanguo
Adobe PDF(1164Kb)
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View/Download:1089/363
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Submit date:2013/09/17
Atomic Layer Deposition of BiFeO3 Thin Films Using β_ Diketonates and H2O
期刊论文
J. Phys. Chem. C, 2013, 卷号: 117, 页码: 24579–24585
Authors:
Feng Zhang , Guosheng Sun , Wanshun Zhao , Lei Wang , Liu Zheng , Shengbei Liu , Bin Liu , Lin Dong , Xingfang Liu , Guoguo Yan , Lixin Tian , and Yiping Zeng
Adobe PDF(472Kb)
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View/Download:759/354
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Submit date:2014/03/19
Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene-Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources
期刊论文
MATERIALS, 2013, 卷号: 6, 期号: 4, 页码: 1543-1553
Authors:
Liu, Xingfang
;
Sun, Guosheng
;
Liu, Bin
;
Yan, Guoguo
;
Guan, Min
;
Zhang, Yang
;
Zhang, Feng
;
Chen, Yu
;
Dong, Lin
;
Zheng, Liu
;
Liu, Shengbei
;
Tian, Lixin
;
Wang, Lei
;
Zhao, Wanshun
;
Zeng, Yiping
Adobe PDF(502Kb)
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View/Download:1241/294
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Submit date:2013/08/27