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中国科学院半导体研究所机构知识库
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碳化硅大面积多片外延生长技术及物性表征
学位论文
, 北京: 中国科学院大学, 2014
Authors:
董林
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View/Download:484/56
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Submit date:2014/06/03
碳化硅
外延生长
物性表征
产业化
化学气相沉积
Surface saturation control on the formation of wurtzite polytypes in zinc blende SiC nanofilms grown on Si(100) substrates
期刊论文
Chinese Physics B, 2013, 卷号: 22, 期号: 8, 页码: 086802
Authors:
Liu Xing-Fang, Sun Guo-Sheng, Liu Bin, Yan Guo-Guo, Guan Min, Zhang Yang, Zhang Feng, Dong Lin, Zheng Liu, Liu Sheng-Bei, Tian Li-Xin, Wang Lei, Zhao Wan-Shun, Zeng Yi-Ping
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View/Download:292/68
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Submit date:2014/03/18
Fast Homoepitaxial Growth of 4H-SiC Films on 4∘ off-Axis Substrates in a SiH4-C2H4-H2 Systemb InAs quantum well structures
期刊论文
Chinese Physics Letters, 2013, 卷号: 30, 期号: 12, 页码: 8101
Authors:
LIU Bin, SUN Guo-Sheng, LIU Xing-Fang, ZHANG Feng, DONG Lin, ZHENG Liu, YAN Guo-Guo, LIU Sheng-Bei, ZHAO Wan-Shun, WANG Lei, ZENG Yi-Ping, LI Xi-Guang, WANG Zhan-Guo, YANG Fei
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View/Download:354/76
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Submit date:2014/03/18
Growth of f4H-SiC epilayers with low surface roughness and morphological defects density on 4° off-axis substrates
期刊论文
Applied Surface Science, 2013, 卷号: 270, 页码: 301-306
Authors:
Dong, Lin
;
Sun, Guosheng
;
Yu, Jun
;
Zheng, Liu
;
Liu, Xingfang
;
Zhang, Feng
;
Yan, Guoguo
;
Li, Xiguang
;
Wang, Zhanguo
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Submit date:2014/03/17
Growth of 4H-SiC epilayers with low surface roughness and morphological defects density on 4 degrees off-axis substrates
期刊论文
APPLIED SURFACE SCIENCE, 2013, 卷号: 270, 页码: 301-306
Authors:
Dong, Lin
;
Sun, Guosheng
;
Yu, Jun
;
Zheng, Liu
;
Liu, Xingfang
;
Zhang, Feng
;
Yan, Guoguo
;
Li, Xiguang
;
Wang, Zhanguo
Adobe PDF(1164Kb)
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View/Download:1094/363
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Submit date:2013/09/17
Characterization of Obtuse Triangular Defects on 4H-SiC 4° off-Axis Epitaxial Wafers
期刊论文
Chinese Physics Letters, 2013, 卷号: 30, 期号: 9, 页码: 096105
Authors:
DONG Lin, SUN Guo-Sheng, YU Jun, ZHENG Liu, LIU Xing-Fang, ZHANG Feng, YAN Guo-Guo, LI Xi-Guang, WANG Zhan-Guo, YANG Fei
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View/Download:498/173
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Submit date:2014/03/17
High-performance 4H-SiC junction barrier Schottky diodes with double resistive termination extensions
期刊论文
Chinese Physics B, 2013, 卷号: 22, 期号: 9, 页码: 7302
Authors:
Zheng Liu, Zhang Feng, Liu Sheng-Bei, Dong Lin, Liu Xing-Fang, Fan Zhong-Chao, Liu Bin, Yan Guo-Guo, Wang Lei, Zhao Wan-Shun, Sun Guo-Sheng, He Zhi, Yang Fu-Hua
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View/Download:405/91
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Submit date:2014/03/26
Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene-Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources
期刊论文
MATERIALS, 2013, 卷号: 6, 期号: 4, 页码: 1543-1553
Authors:
Liu, Xingfang
;
Sun, Guosheng
;
Liu, Bin
;
Yan, Guoguo
;
Guan, Min
;
Zhang, Yang
;
Zhang, Feng
;
Chen, Yu
;
Dong, Lin
;
Zheng, Liu
;
Liu, Shengbei
;
Tian, Lixin
;
Wang, Lei
;
Zhao, Wanshun
;
Zeng, Yiping
Adobe PDF(502Kb)
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View/Download:1245/294
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Submit date:2013/08/27
单模微腔激光器和光学相干的研究
学位论文
, 北京: 中国科学院研究生院, 2012
Authors:
林建东
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View/Download:988/87
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Submit date:2012/06/25
Development of vertical 32" LPCVD system for fast epitaxial growth on 4H-SiC
期刊论文
Materials Science Forum, 2012, 卷号: 717-720, 页码: 105-108
Authors:
Zhao, Wanshun
;
Sun, Guosheng
;
Wu, Hailei
;
Yan, Guoguo
;
Zheng, Liu
;
Dong, Lin
;
Wang, Lei
;
Liu, Xingfang
;
Yang, Lijun
Adobe PDF(250Kb)
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View/Download:734/175
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Submit date:2013/04/22