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3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity 期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2019, 卷号: 286, 页码: 123-132
Authors:  Zeji Chen ;   Fengxiang Wang ;   Quan Yuan ;   Xiao Kan ;   Jinling Yang ;   Jicong Zhao ;   Fuhua Yang
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无权访问的条目 学位论文
Authors:  赵继聪
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A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonators 期刊论文
Journal of Micromechanics and Microengineering, 2016, 卷号: 27, 期号: 1, 页码: 014003
Authors:  Jicong Zhao;  Quan Yuan;  Xiao Kan;  and Jinling Yang;  Fuhua Yang
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具有低特征导通电阻的SiC VDMOSFET结构及其制造方法 专利
专利类型: 发明, 公开日期: 2016-08-30
Inventors:  王进泽;  杨香;  颜伟;  刘胜北;  赵继聪;  何志;  王晓东;  杨富华
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