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| The Fabrication of Micro/Nano Structures by Laser Machining 期刊论文
Nanomaterials, 2019, 卷号: 9, 页码: 1789
Authors: Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang
 Adobe PDF(12437Kb) |  Favorite | View/Download：166/0 | Submit date：2020/08/05 |
| Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via 期刊论文
Sensors, 2019, 卷号: 19, 页码: 93
Authors: Meng Zhang; Jian Yang ; Yurong He ; Fan Yang ; Fuhua Yang ; Guowei Han ; Chaowei Si; Jin Ning
Adobe PDF(3329Kb) | Favorite | View/Download：32/0 | Submit date：2020/08/05 |
| A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer 期刊论文
Micromachines, 2019, 卷号: 10, 期号: 9, 页码: 589
Authors: Jian Yang; Meng Zhang; Yurong He; Yan Su ; Guowei Han ; Chaowei Si ; Jin Ning; Fuhua Yang ; Xiaodong Wang
Adobe PDF(6047Kb) | Favorite | View/Download：28/0 | Submit date：2020/08/05 |
| A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope 期刊论文
MICROMACHINES, 2019, 卷号: 10, 页码: 244
Authors: Jian Yang; Chaowei Si; Guowei Han ; Meng Zhang ; Jin Ning; Yongmei Zhao ; Fuhua Yang; Xiaodong Wang
Adobe PDF(5846Kb) | Favorite | View/Download：91/0 | Submit date：2020/08/05 |
| Rapidly fabricating a large area nanotip microstructure for high-sensitivity SERS applications 期刊论文
Nanoscale, 2019, 卷号: 11, 期号: 42, 页码: 20194-20198
Authors: Jing Ma; Wen Liu, a Zhe Ma; Peishuai Song; Yongqiang Zhao; Fuhua Yang ; Xiaodong Wang
Adobe PDF(1385Kb) | Favorite | View/Download：20/0 | Submit date：2020/08/05 |
| A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer 期刊论文
Journal of Microelectromechanical Systems, 2019, 卷号: 28, 期号: 5, 页码: 776-781
Authors: Jian Yang; Meng Zhang; Chaowei Si; Guowei Han; Jin Ning; Fuhua Yang; Xiaodong Wang
Adobe PDF(2407Kb) | Favorite | View/Download：34/0 | Submit date：2020/08/05 |
| A NovelMultiple-Frequency RF-MEMS Resonator Based on the Whispering Gallery Modes 期刊论文
IEEE Transactions on Electron Devices, 2019, 卷号: 66, 期号: 8, 页码: 3683-3685
Authors: Xiao Kan ; Zeji Chen; Quan Yuan ; Fengxiang Wang; Jinling Yang; Fuhua Yang
Adobe PDF(1583Kb) | Favorite | View/Download：24/0 | Submit date：2020/08/05 |
| Discrete energy states induced broadband emission from self-assembly InGaN quantum dots 期刊论文
Optical Materials, 2019, 卷号: 94, 页码: 237-240
Authors: Xiaoli Ji ; Xiaoyu Tan ; Tongbo Wei ; Hongxi Lu ; Junxi Wang ; Fuhua Yang ; Jinmin Li
Adobe PDF(1252Kb) | Favorite | View/Download：97/0 | Submit date：2020/08/05 |
| 3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity 期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2019, 卷号: 286, 页码: 123-132
Authors: Zeji Chen ; Fengxiang Wang ; Quan Yuan ; Xiao Kan ; Jinling Yang ; Jicong Zhao ; Fuhua Yang
Adobe PDF(3659Kb) | Favorite | View/Download：57/0 | Submit date：2020/07/31 |
| Enhanced Binding Efficiency of Microcantilever Biosensor for the Detection of Yersinia 期刊论文
Sensors, 2019, 卷号: 19, 页码: 3326
Authors: Xiaochen Liu; Lihao Wang ; Junyuan Zhao ; Yinfang Zhu ; Jinling Yang ; Fuhua Yang
Adobe PDF(3477Kb) | Favorite | View/Download：31/0 | Submit date：2020/07/31 |
