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| The Fabrication of Micro/Nano Structures by Laser Machining 期刊论文 Nanomaterials, 2019, 卷号: 9, 页码: 1789 Authors: Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang
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| Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via 期刊论文 Sensors, 2019, 卷号: 19, 页码: 93 Authors: Meng Zhang; Jian Yang ; Yurong He ; Fan Yang ; Fuhua Yang ; Guowei Han ; Chaowei Si; Jin Ning
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| A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer 期刊论文 Micromachines, 2019, 卷号: 10, 期号: 9, 页码: 589 Authors: Jian Yang; Meng Zhang; Yurong He; Yan Su ; Guowei Han ; Chaowei Si ; Jin Ning; Fuhua Yang ; Xiaodong Wang
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| A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope 期刊论文 MICROMACHINES, 2019, 卷号: 10, 页码: 244 Authors: Jian Yang; Chaowei Si; Guowei Han ; Meng Zhang ; Jin Ning; Yongmei Zhao ; Fuhua Yang; Xiaodong Wang
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| Rapidly fabricating a large area nanotip microstructure for high-sensitivity SERS applications 期刊论文 Nanoscale, 2019, 卷号: 11, 期号: 42, 页码: 20194-20198 Authors: Jing Ma; Wen Liu, a Zhe Ma; Peishuai Song; Yongqiang Zhao; Fuhua Yang ; Xiaodong Wang
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| A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer 期刊论文 Journal of Microelectromechanical Systems, 2019, 卷号: 28, 期号: 5, 页码: 776-781 Authors: Jian Yang; Meng Zhang; Chaowei Si; Guowei Han; Jin Ning; Fuhua Yang; Xiaodong Wang
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| A NovelMultiple-Frequency RF-MEMS Resonator Based on the Whispering Gallery Modes 期刊论文 IEEE Transactions on Electron Devices, 2019, 卷号: 66, 期号: 8, 页码: 3683-3685 Authors: Xiao Kan ; Zeji Chen; Quan Yuan ; Fengxiang Wang; Jinling Yang; Fuhua Yang
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| Discrete energy states induced broadband emission from self-assembly InGaN quantum dots 期刊论文 Optical Materials, 2019, 卷号: 94, 页码: 237-240 Authors: Xiaoli Ji ; Xiaoyu Tan ; Tongbo Wei ; Hongxi Lu ; Junxi Wang ; Fuhua Yang ; Jinmin Li
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| 3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity 期刊论文 SENSORS AND ACTUATORS A-PHYSICAL, 2019, 卷号: 286, 页码: 123-132 Authors: Zeji Chen ; Fengxiang Wang ; Quan Yuan ; Xiao Kan ; Jinling Yang ; Jicong Zhao ; Fuhua Yang
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| Enhanced Binding Efficiency of Microcantilever Biosensor for the Detection of Yersinia 期刊论文 Sensors, 2019, 卷号: 19, 页码: 3326 Authors: Xiaochen Liu; Lihao Wang ; Junyuan Zhao ; Yinfang Zhu ; Jinling Yang ; Fuhua Yang
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