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碳化硅射频微电子机械系统滤波器的制作方法 专利
专利类型: 发明, 申请日期: 2009-07-01, 公开日期: 3999
Inventors:  赵永梅;  宁 瑾;  孙国胜;  王 亮;  刘兴昉;  赵万顺;  王 雷;  李晋闽;  曾一平 
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多晶立方相碳化硅微机电系统谐振器件及其制作方法 专利
专利类型: 发明, 申请日期: 2009-06-03, 公开日期: 3996
Inventors:  王 亮;  宁 瑾;  孙国胜;  王 雷;  赵万顺;  赵永梅;  刘兴昉 
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氧化硅上制备低阻碳化硅的方法 专利
专利类型: 发明, 申请日期: 2009-05-27, 公开日期: 3996
Inventors:  赵永梅;  孙国胜;  宁 瑾;  王 亮;  刘兴昉;  赵万顺;  王 雷;  李晋闽;  曾一平
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图形衬底上生长碳化硅厚膜的方法 专利
专利类型: 发明, 申请日期: 2009-05-27, 公开日期: 3996
Inventors:  赵永梅;  孙国胜;  刘兴昉;  王 亮;  王 雷;  赵万顺;  李晋闽;  曾一平 
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无权访问的条目 期刊论文
Authors:  Wang H;  Wang LL;  Sun X;  Zhu JH;  Liu WB;  Jiang DS;  Zhu JJ;  Zhao DG;  Liu ZS;  Wang YT;  Zhang SM;  Yang H;  Wang H Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect POB 912 Beijing 100083 Peoples R China. E-mail Address: wangh@red.semi.ac.cn
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硅基多晶立方相SiC微机械谐振器的模型及工艺研究 学位论文
, 北京: 中国科学院半导体研究所, 2008
Authors:  王亮
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无权访问的条目 期刊论文
Authors:  Wang LL;  Wang H;  Chen J;  Sun X;  Zhu JJ;  Jiang DS;  Yang H;  Liang JW;  Wang, LL, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, POB 912, Beijing 100083, Peoples R China. 电子邮箱地址: wangll@red.semi.ac.cn
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无权访问的条目 期刊论文
Authors:  Wang Liang;  Zhao Yongmei;  Ning Jin;  Sun Guosheng;  Wang Lei;  Liu Xingfang;  Zhao Wanshun;  Zeng Yiping;  Li Jinmin
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Heavily doped polycrystalline 3C-SiC growth on SiO2/Si(100) substrates for resonator applications 会议论文
Silicon Carbide and Related Materials 2006丛书标题: MATERIALS SCIENCE FORUM, Newcastle upon Tyne, ENGLAND, SEP, 2006
Authors:  Sun, G (Sun, Guosheng);  Ning, J (Ning, Jin);  Liu, X (Liu, Xingfang);  Zhao, Y (Zhao, Yongmei);  Li, J (Li, Jiaye);  Wang, L (Wang, Lei);  Zhao, W (Zhao, Wanshun);  Wang, L (Wang, Liang);  Sun, G, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.
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Polycrystalline 3c-sic  Resonator  Doping  Silicon-carbide  
无权访问的条目 期刊论文
Authors:  Wang H;  Huang Y;  Sun Q;  Chen J;  Zhu JJ;  Wang LL;  Wang YT;  Yang H;  Wu MF;  Qu YH;  Jiang DS;  Wang, H, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, POB 912, Beijing 100083, Peoples R China. 电子邮箱地址: wangh@red.semi.ac.cn
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