Knowledge Management System Of Institute of Semiconductors,CAS
氧化硅上制备低阻碳化硅的方法 | |
赵永梅; 孙国胜; 宁 瑾; 王 亮; 刘兴昉![]() | |
2009-05-27 | |
Rights Holder | 中科院半导体研究所 |
Date Available | 3996 |
Country | 中国 |
Subtype | 发明 |
Application Date | 2007-11-21 |
Language | 中文 |
Status | 公开 |
Application Number | CN200710177783 |
Patent Agent | 汤宝平 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/9164 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | 赵永梅,孙国胜,宁 瑾,等. 氧化硅上制备低阻碳化硅的方法[P]. 2009-05-27. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
3517.pdf(564KB) | 限制开放 | -- | Application Full Text |
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