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SEMI OpenIR  > 中国科学院半导体研究所（2009年前）
多晶立方相碳化硅微机电系统谐振器件及其制作方法
王 亮; 宁 瑾; 孙国胜; 王 雷; 赵万顺; 赵永梅; 刘兴昉 
2009-06-03
Rights Holder中科院半导体研究所
Date Available3996
Country中国
Subtype发明
Application Date2007-11-28
Language中文
Status公开
Application NumberCN200710178328
Patent Agent汤宝平
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/9142
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 王 亮,宁 瑾,孙国胜,等. 多晶立方相碳化硅微机电系统谐振器件及其制作方法[P]. 2009-06-03.
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3506.pdf（519KB） 限制开放--Application Full Text
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