SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
气源分子束外延生长锗硅异质结双极晶体管材料掺杂方法
黄大定; 李建平; 高斐; 林燕霞; 孙殿照; 刘金平; 朱世荣; 孔梅影
2002-10-16
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2001-03-08
Language中文
Application NumberCN01109415.X
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3075
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
黄大定,李建平,高斐,等. 气源分子束外延生长锗硅异质结双极晶体管材料掺杂方法[P]. 2002-10-16.
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