×
验证码:
换一张
忘记密码?
记住我
×
登录
中文版
|
English
中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
ALL
ORCID
题名
作者
学科领域
关键词
文献类型
出处
收录类别
出版者
发表日期
存缴日期
资助项目
学科门类
学习讨论厅
图片搜索
粘贴图片网址
首页
研究单元&专题
作者
文献类型
学科分类
知识图谱
新闻&公告
在结果中检索
研究单元&专题
中国科学院半导体研究... [9]
半导体集成技术工程研... [1]
作者
文献类型
会议论文 [10]
发表日期
2009 [1]
2008 [2]
2007 [3]
2006 [2]
2004 [2]
语种
英语 [10]
出处
2004 7TH I... [2]
2008 9TH I... [2]
Silicon Ca... [2]
2009 ICME ... [1]
INTERNATIO... [1]
Physica St... [1]
更多...
资助项目
收录类别
CPCI-S [8]
CPCI(ISTP) [1]
其他 [1]
资助机构
Chinese In... [2]
IEEE Beiji... [2]
II VI Inc.... [2]
Aixtron.; ... [1]
ICME. [1]
×
知识图谱
SEMI OpenIR
开始提交
已提交作品
待认领作品
已认领作品
未提交全文
收藏管理
QQ客服
官方微博
反馈留言
浏览/检索结果:
共10条,第1-10条
帮助
限定条件
文献类型:会议论文
已选(
0
)
清除
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
题名升序
题名降序
WOS被引频次升序
WOS被引频次降序
发表日期升序
发表日期降序
提交时间升序
提交时间降序
作者升序
作者降序
期刊影响因子升序
期刊影响因子降序
Implantable Microsystem for Wireless Neural Recording Applications
会议论文
2009 ICME INTERNATIONAL CONFERENCE ON COMPLEX MEDICAL ENGINEERING, Tempe, AZ, APR 09-11, 2009
作者:
Zhang X (Zhang Xu)
;
Pei WH (Pei Weihua)
;
Huang BJ (Huang Beiju)
;
Chen J (Chen Jin)
;
Guan N (Guan Ning)
;
Chen HD (Chen Hongda)
;
Zhang, X, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
Adobe PDF(1810Kb)
  |  
收藏
  |  
浏览/下载:2084/322
  |  
提交时间:2010/03/09
System
High epitaxial growth rate of 4H-SiC using TCS as silicon precursor
会议论文
2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, Beijing, PEOPLES R CHINA, OCT 20-23, 2008
作者:
Ji, G
;
Sun, GS
;
Ning, J
;
Liu, XF
;
Zhao, YM
;
Wang, L
;
Zhao, WS
;
Zeng, YP
;
Ji, G, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China.
Adobe PDF(1783Kb)
  |  
收藏
  |  
浏览/下载:1498/225
  |  
提交时间:2010/03/09
Simulation and fabrication of the SiC-based clamped-clamped filter
会议论文
2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, Beijing, PEOPLES R CHINA, OCT 20-23, 2008
作者:
Zhao, YM
;
Ning, J
;
Sun, GS
;
Liu, XF
;
Wang, L
;
Ji, G
;
Zhao, WS
;
Li, JM
;
Yang, FH
;
Zhao, YM, Chinese Acad Sci, Inst Semicond, State Key Labs Transducer Technol, Beijing 100083, Peoples R China.
Adobe PDF(4954Kb)
  |  
收藏
  |  
浏览/下载:1546/274
  |  
提交时间:2010/03/09
Micromechanical Resonators
Frequency
Heavily doped polycrystalline 3C-SiC growth on SiO2/Si(100) substrates for resonator applications
会议论文
Silicon Carbide and Related Materials 2006丛书标题: MATERIALS SCIENCE FORUM, Newcastle upon Tyne, ENGLAND, SEP, 2006
作者:
Sun, G (Sun, Guosheng)
;
Ning, J (Ning, Jin)
;
Liu, X (Liu, Xingfang)
;
Zhao, Y (Zhao, Yongmei)
;
Li, J (Li, Jiaye)
;
Wang, L (Wang, Lei)
;
Zhao, W (Zhao, Wanshun)
;
Wang, L (Wang, Liang)
;
Sun, G, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.
Adobe PDF(992Kb)
  |  
收藏
  |  
浏览/下载:1612/222
  |  
提交时间:2010/03/29
Polycrystalline 3c-sic
Resonator
Doping
Silicon-carbide
Homoepitaxial growth of 4H-SiC multi-epilayers and its application to UV detection
会议论文
Silicon Carbide and Related Materials 2006丛书标题: MATERIALS SCIENCE FORUM, Newcastle upon Tyne, ENGLAND, SEP, 2006
作者:
Liu, XF (Liu, X. F.)
;
Sun, GS (Sun, G. S.)
;
Zhao, YM (Zhao, Y. M.)
;
Ning, J (Ning, J.)
;
Li, JY (Li, J. Y.)
;
Wang, L (Wang, L.)
;
Zhao, WS (Zhao, W. S.)
;
Luo, MC (Luo, M. C.)
;
Li, JM (Li, J. M.)
;
Liu, XF, Chinese Acad Sci, Inst Semicond, Novel Semicond Mat Lab, Beijing 100083, Peoples R China.
Adobe PDF(908Kb)
  |  
收藏
  |  
浏览/下载:1264/198
  |  
提交时间:2010/03/29
Homoepitaxy
4h-sic
Multi-epilayer
Uv Detection
p(+)-pi-n(-)
Ultraviolet Photodetector
Epitaxial-growth
Vertical PIN ultraviolet photodetectors based on 4H-SiC homoepilayers
会议论文
Physica Status Solidi C - Current Topics in Solid State Physics丛书标题: PHYSICA STATUS SOLIDI C-CURRENT TOPICS IN SOLID STATE PHYSICS, Vancouver, CANADA, AUG 13-17, 2006
作者:
Liu, XF (Liu, X. F.)
;
Sun, GS (Sun, G. S.)
;
Li, JM (Li, J. M.)
;
Ning, J (Ning, J.)
;
Zhao, YM (Zhao, Y. M.)
;
Luo, MC (Luo, M. C.)
;
Wang, L (Wang, L.)
;
Zhao, WS (Zhao, W. S.)
;
Zeng, YP (Zeng, Y. P.)
;
Liu, XF, Chinese Acad Sci, Inst Semicond, Novel Semicond Mat Lab, Beijing 100083, Peoples R China.
Adobe PDF(209Kb)
  |  
收藏
  |  
浏览/下载:1400/273
  |  
提交时间:2010/03/29
Avalanche Photodiodes
Area
Homoepitaxial growth and characterization of 4H-SiC epilayers by low-pressure hot-wall chemical vapor deposition
会议论文
Silicon Carbide and Related Materials 2005丛书标题: MATERIALS SCIENCE FORUM, Pittsburgh, PA, SEP 18-23, 2005
作者:
Sun, GS (Sun, Guosheng)
;
Ning, J (Ning, Jin)
;
Gong, QC (Gong, Quancheng)
;
Gao, X (Gao, Xin)
;
Wang, L (Wang, Lei)
;
Liu, XF (Liu, Xingfang)
;
Zeng, YP (Zeng, Yiping)
;
Li, JM (Li, Jinmin)
;
Sun, GS, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.
Adobe PDF(981Kb)
  |  
收藏
  |  
浏览/下载:1479/203
  |  
提交时间:2010/03/29
Homoepitaxial Growth
Low-pressure Hot-wall Cvd
Structural And Optical Characteristics
Intentional Doping
Schottky Barrier Diodes
The ICP etching technology of 3C-SiC films
会议论文
INTERNATIONAL MEMS CONFERENCE 2006, 34: 511-515 2006, Singapore, SINGAPORE, MAY 09-12, 2006
作者:
Ning J (Ning Jin)
;
Gong QC (Gong Quancheng)
;
Sun GS (Sun Guosheng)
;
Liu ZL (Liu Zhongli)
Adobe PDF(325Kb)
  |  
收藏
  |  
浏览/下载:1880/476
  |  
提交时间:2011/07/14
A silicon capacitive microphone based on oxidized porous silicon sacrificial technology
会议论文
2004 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, Beijing, PEOPLES R CHINA, OCT 18-21, 2004
作者:
Ning, J
;
Liu, ZL
;
Liu, HZ
;
Ge, YC
;
Ning, J, Chinese Acad Sci, Microelect R&D Ctr, Inst Semicond, Beijing 100083, Peoples R China.
Adobe PDF(151Kb)
  |  
收藏
  |  
浏览/下载:1157/186
  |  
提交时间:2010/03/29
Silicon Capacitive Microphone
Oxidized Porous Silicon
Sacrificial Layer
Homoepitaxial growth and MOS structures of 4H-SiC on off oriented n-type (0001)Si-faces
会议论文
2004 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, Beijing, PEOPLES R CHINA, OCT 18-21, 2004
作者:
Sun, GS
;
Ning, J
;
Zhang, YX
;
Gao, X
;
Wang, L
;
Zhao, WS
;
Zeng, YP
;
Li, JM
;
Sun, GS, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.
Adobe PDF(201Kb)
  |  
收藏
  |  
浏览/下载:1543/208
  |  
提交时间:2010/03/29
4h-sic
Lpcvd Homoepitaxial Growth
Thermal Oxidization
Mos Structures
Hot-wall Cvd