SEMI OpenIR

Browse/Search Results:  1-10 of 15 Help

Selected(0)Clear Items/Page:    Sort:
MEMS惯性导航器件的结构级鲁棒性设计 学位论文
, 北京: 中国科学院研究生院, 2014
Authors:  司朝伟
Adobe PDF(5176Kb)  |  Favorite  |  View/Download:838/52  |  Submit date:2014/07/16
Fabrication and characterization of an SOI MEMS gyroscope 期刊论文
Journal of Semiconductors, 2013, 卷号: 34, 期号: 6, 页码: 064004
Authors:  Zhong Weiwei;  Han Guowei;  Si Chaowei;  Ning Jin;  Yang Fuhua
Adobe PDF(1921Kb)  |  Favorite  |  View/Download:836/120  |  Submit date:2014/05/16
Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram 期刊论文
Advanced Materials Research, 2013, 卷号: 677, 页码: 74-78
Authors:  Han, Guowei;  Si, Chaowei;  Ning, Jing;  Zhao, Yongmei;  Sun, Guosheng;  Yang, Fuhua
Adobe PDF(560Kb)  |  Favorite  |  View/Download:595/139  |  Submit date:2014/05/08
Feed-through cancellation of a MEMS filter using the difference method and analysis of the induced notch 期刊论文
Journal of Semiconductors, 2013, 卷号: 34, 期号: 4, 页码: 045006
Authors:  Han, Guowei;  Si, Chaowei;  Ning, Jin;  Zhong, Weiwei;  Sun, Guosheng;  Zhao, Yongmei;  Yang, Fuhua
Adobe PDF(818Kb)  |  Favorite  |  View/Download:544/130  |  Submit date:2014/04/28
Fabrication and characterisation of polysilicon-based clamped-clamped filter 期刊论文
Key Engineering Materials, 2011, 卷号: 483, 页码: 112-116
Authors:  Zhao, Yongmei;  Ning, Jin;  Han, Guowei;  Si, Chaowei;  Zhao, Y.(ymzhao@semi.ac.cn)
Adobe PDF(1548Kb)  |  Favorite  |  View/Download:1011/250  |  Submit date:2012/06/14
Electromechanical Filters  Fabrication  Microelectromechanical Devices  Nanotechnology  Polysilicon  Resonators  Technology  
采用压电材料制备的阵列结构微机电谐振器 专利
专利类型: 发明, 公开日期: 2013-04-03, 2013-04-03
Inventors:  康中波;  司朝伟;  宁瑾;  韩国威
Adobe PDF(456Kb)  |  Favorite  |  View/Download:533/100  |  Submit date:2014/10/24
基于寄生电容调节的高精度温度补偿MEMS振荡器 专利
专利类型: 发明, 公开日期: 2012-07-18
Inventors:  司朝伟;  韩国威;  宁瑾;  刘晓东
Adobe PDF(414Kb)  |  Favorite  |  View/Download:406/95  |  Submit date:2014/10/31
采用窄脉冲激励MEMS谐振器的振荡器电路 专利
专利类型: 发明, 公开日期: 2012-07-18
Inventors:  司朝伟;  韩国威;  宁瑾;  刘晓东
Adobe PDF(349Kb)  |  Favorite  |  View/Download:412/115  |  Submit date:2014/10/31
谐振式微机电系统机翼风力传感器及其制作方法 专利
专利类型: 发明, 公开日期: 2013-05-22
Inventors:  钟卫威;  司朝伟;  韩国威;  宁瑾;  杨富华
Adobe PDF(836Kb)  |  Favorite  |  View/Download:486/86  |  Submit date:2014/11/24
调节电容式MEMS陀螺仪检测端谐振频率的电路和方法 专利
专利类型: 发明, 公开日期: 2013-06-05
Inventors:  韩国威;  司朝伟;  钟卫威
Adobe PDF(697Kb)  |  Favorite  |  View/Download:646/92  |  Submit date:2014/11/24