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3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity 期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2019, 卷号: 286, 页码: 123-132
Authors:  Zeji Chen ;   Fengxiang Wang ;   Quan Yuan ;   Xiao Kan ;   Jinling Yang ;   Jicong Zhao ;   Fuhua Yang
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Enhanced Binding Efficiency of Microcantilever Biosensor for the Detection of Yersinia 期刊论文
Sensors, 2019, 卷号: 19, 页码: 3326
Authors:  Xiaochen Liu;   Lihao Wang ;   Junyuan Zhao ;   Yinfang Zhu ;   Jinling Yang ;   Fuhua Yang
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Discrete energy states induced broadband emission from self-assembly InGaN quantum dots 期刊论文
Optical Materials, 2019, 卷号: 94, 页码: 237-240
Authors:  Xiaoli Ji ;   Xiaoyu Tan ;   Tongbo Wei ;   Hongxi Lu ;   Junxi Wang ;   Fuhua Yang ;   Jinmin Li
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Rapidly fabricating a large area nanotip microstructure for high-sensitivity SERS applications 期刊论文
Nanoscale, 2019, 卷号: 11, 期号: 42, 页码: 20194-20198
Authors:  Jing Ma;   Wen Liu, a Zhe Ma;   Peishuai Song;   Yongqiang Zhao;   Fuhua Yang ;   Xiaodong Wang
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A NovelMultiple-Frequency RF-MEMS Resonator Based on the Whispering Gallery Modes 期刊论文
IEEE Transactions on Electron Devices, 2019, 卷号: 66, 期号: 8, 页码: 3683-3685
Authors:  Xiao Kan ;   Zeji Chen;   Quan Yuan ;   Fengxiang Wang;   Jinling Yang;   Fuhua Yang
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The Fabrication of Micro/Nano Structures by Laser Machining 期刊论文
Nanomaterials, 2019, 卷号: 9, 页码: 1789
Authors:  Liangliang Yang;   Jiangtao Wei ;   Zhe Ma ;   Peishuai Song;   Jing Ma ;   Yongqiang Zhao;   Zhen Huang ;   Mingliang Zhang ;   Fuhua Yang ;   Xiaodong Wang
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A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer 期刊论文
Micromachines, 2019, 卷号: 10, 期号: 9, 页码: 589
Authors:  Jian Yang;   Meng Zhang;   Yurong He;   Yan Su ;   Guowei Han ;   Chaowei Si ;   Jin Ning;   Fuhua Yang ;   Xiaodong Wang
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A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope 期刊论文
MICROMACHINES, 2019, 卷号: 10, 页码: 244
Authors:  Jian Yang;   Chaowei Si;   Guowei Han ;   Meng Zhang ;   Jin Ning;   Yongmei Zhao ;   Fuhua Yang;   Xiaodong Wang
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Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via 期刊论文
Sensors, 2019, 卷号: 19, 页码: 93
Authors:  Meng Zhang;   Jian Yang ;   Yurong He ;   Fan Yang ;   Fuhua Yang ;   Guowei Han ;   Chaowei Si;   Jin Ning
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A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer 期刊论文
Journal of Microelectromechanical Systems, 2019, 卷号: 28, 期号: 5, 页码: 776-781
Authors:  Jian Yang;  Meng Zhang;  Chaowei Si;  Guowei Han;  Jin Ning;  Fuhua Yang;  Xiaodong Wang
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