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A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS 会议论文
PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS 页: 205-208, Cancun, MEXICO, 2011
作者:  Xie J (Xie J.);  Liu YF (Liu Y. F.);  Zhang ML (Zhang M. L.);  Yang JL (Yang J. L.);  Yang FH (Yang F. H.)
Adobe PDF(2599Kb)  |  收藏  |  浏览/下载：1937/358  |  提交时间：2011/12/13
In-situ Boron-doped Low-stress LPCVD Polysilicon for Micromechanical Disk Resonator 会议论文
2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, Beijing, PEOPLES R CHINA, OCT 20-23, 2008
作者:  Liu, YF;  Xie, J;  Yang, JL;  Tang, LJ;  Yang, FH;  Liu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.
Adobe PDF(1394Kb)  |  收藏  |  浏览/下载：1520/370  |  提交时间：2010/03/09
Films  
Heavily doped polycrystalline 3C-SiC growth on SiO2/Si(100) substrates for resonator applications 会议论文
Silicon Carbide and Related Materials 2006丛书标题: MATERIALS SCIENCE FORUM, Newcastle upon Tyne, ENGLAND, SEP, 2006
作者:  Sun, G (Sun, Guosheng);  Ning, J (Ning, Jin);  Liu, X (Liu, Xingfang);  Zhao, Y (Zhao, Yongmei);  Li, J (Li, Jiaye);  Wang, L (Wang, Lei);  Zhao, W (Zhao, Wanshun);  Wang, L (Wang, Liang);  Sun, G, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.
Adobe PDF(992Kb)  |  收藏  |  浏览/下载：1611/222  |  提交时间：2010/03/29
Polycrystalline 3c-sic  Resonator  Doping  Silicon-carbide  
The ICP etching technology of 3C-SiC films 会议论文
INTERNATIONAL MEMS CONFERENCE 2006, 34: 511-515 2006, Singapore, SINGAPORE, MAY 09-12, 2006
作者:  Ning J (Ning Jin);  Gong QC (Gong Quancheng);  Sun GS (Sun Guosheng);  Liu ZL (Liu Zhongli)
Adobe PDF(325Kb)  |  收藏  |  浏览/下载：1879/476  |  提交时间：2011/07/14
Fabrication of 1.3 mu m Si-based MEMS tunable optical filter 会议论文
MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS, 4928, SHANGHAI, PEOPLES R CHINA, OCT 17-18, 2002
作者:  Zuo YH;  Huang CJ;  Cheng BW;  Mao RW;  Luo LP;  Gao JH;  Bai YX;  Wang LC;  Yu JZ;  Wang QM;  Zuo YH Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect Beijing 100083 Peoples R China.
Adobe PDF(158Kb)  |  收藏  |  浏览/下载：1529/342  |  提交时间：2010/10/29
Fabry-perot  Tunable Filter  Surface Micromaching  Cavity