SEMI OpenIR  > 中科院半导体材料科学重点实验室
一种氮化镓基绝缘栅双极晶体管制备方法及其产品
王晓亮; 闫俊达; 李百泉; 王权; 肖红领; 冯春; 殷海波; 姜丽娟; 邱爱芹; 介芳
Rights Holder中国科学院半导体所
Date Available2016-09-12
Country中国
Subtype发明
Subject Area半导体材料
Application Date2015-12-08
Application NumberCN201510892854.X
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27361
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
王晓亮,闫俊达,李百泉,等. 一种氮化镓基绝缘栅双极晶体管制备方法及其产品.
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