SEMI OpenIR  > 中科院半导体材料科学重点实验室
一种半导体薄膜生长设备
刘兴昉; 刘斌; 郑柳; 董林; 刘胜北; 闫果果; 孙国胜; 曾一平
Rights Holder中国科学院半导体研究所
Date Available2014-04-09
Country中国
Subtype发明
Subject Area半导体材料
Application Date2013-07-25
Application NumberCN201320445673.9
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25819
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
刘兴昉,刘斌,郑柳,等. 一种半导体薄膜生长设备.
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