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一种在蓝宝石衬底上生长自剥离氮化镓薄膜的方法
王建霞; 李志伟; 赵桂娟; 桑玲; 刘长波; 魏鸿源; 焦春美; 杨少延; 刘祥林; 朱勤生; 王占国
Rights Holder中国科学院半导体研究所
Date Available2012-12-26
Country中国
Subtype发明
Subject Area半导体材料
Application Date2012-09-05
Application NumberCN201210325765.3
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25328
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
王建霞,李志伟,赵桂娟,等. 一种在蓝宝石衬底上生长自剥离氮化镓薄膜的方法.
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