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Fabrication of a Low-Loss SSC Using High-Dose Electron Beam Lithography Exposure With Negative PMMA Resist 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2010, 卷号: 22, 期号: 7, 页码: 501-503
Authors:  Liu Y (Liu Yan);  Xu XJ (Xu Xuejun);  Xing B (Xing Bo);  Yu YD (Yu Yude);  Yu JZ (Yu Jinzhong);  Liu, Y, Chinese Acad Sci, Inst Semicond, State Key Lab Optoelect, Beijing 100083, Peoples R China.E-mail Address: liuyan@semi.ac.cn;  xjxu@semi.ac.cn;  xingbo@semi.ac.cn;  yudeyu@semi.ac.cn;  jzyu@semi.ac.cn
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Silicon-on-insulator (Soi)  
一种生长二氧化硅薄膜的方法 专利
专利类型: 发明, 申请日期: 2008-07-02, 公开日期: 2009-06-04, 2009-06-11
Inventors:  王晓东;  季安;  邢波;  杨富华
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短小光波导芯片的测量方法 专利
专利类型: 发明, 申请日期: 2007-12-26, 公开日期: 2009-06-04, 2009-06-11
Inventors:  余和军;  余金中;  邢波
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Flat-top arrayed waveguide grating using a tapered multimode interferometer 期刊论文
OPTICAL ENGINEERING, 2006, 卷号: 45, 期号: 9, 页码: Art.No.094601
Authors:  An JM (An Junming);  Wu YD (Wu Yuanda);  Wang HJ (Wang Hongjie);  Li JG (Li Jianguang);  Xing B (Xing Bo);  Hu XW (Hu Xiongwei);  An, JM, Inner Mongolian Univ, Dept Phys, Hohhot 010021, Peoples R China. E-mail: junming@red.semi.ac.cn
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Optical Planar Waveguides  Phased Arrays  Wavelength Division Multiplexing  Flat-top  Passband  
一种复合膜片压力传感器结构 专利
专利类型: 发明, 专利号: CN200810224110.0, 公开日期: 2011-08-31
Inventors:  王晓东;  樊中朝;  季安;  邢波;  杨富华
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