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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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Surface saturation control on the formation of wurtzite polytypes in zinc blende SiC nanofilms grown on Si(100) substrates
期刊论文
Chinese Physics B, 2013, 卷号: 22, 期号: 8, 页码: 086802
Authors:
Liu Xing-Fang, Sun Guo-Sheng, Liu Bin, Yan Guo-Guo, Guan Min, Zhang Yang, Zhang Feng, Dong Lin, Zheng Liu, Liu Sheng-Bei, Tian Li-Xin, Wang Lei, Zhao Wan-Shun, Zeng Yi-Ping
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View/Download:292/68
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Submit date:2014/03/18
Fast Homoepitaxial Growth of 4H-SiC Films on 4∘ off-Axis Substrates in a SiH4-C2H4-H2 Systemb InAs quantum well structures
期刊论文
Chinese Physics Letters, 2013, 卷号: 30, 期号: 12, 页码: 8101
Authors:
LIU Bin, SUN Guo-Sheng, LIU Xing-Fang, ZHANG Feng, DONG Lin, ZHENG Liu, YAN Guo-Guo, LIU Sheng-Bei, ZHAO Wan-Shun, WANG Lei, ZENG Yi-Ping, LI Xi-Guang, WANG Zhan-Guo, YANG Fei
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View/Download:354/76
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Submit date:2014/03/18
High-performance 4H-SiC junction barrier Schottky diodes with double resistive termination extensions
期刊论文
Chinese Physics B, 2013, 卷号: 22, 期号: 9, 页码: 7302
Authors:
Zheng Liu, Zhang Feng, Liu Sheng-Bei, Dong Lin, Liu Xing-Fang, Fan Zhong-Chao, Liu Bin, Yan Guo-Guo, Wang Lei, Zhao Wan-Shun, Sun Guo-Sheng, He Zhi, Yang Fu-Hua
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View/Download:405/91
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Submit date:2014/03/26
Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene-Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources
期刊论文
MATERIALS, 2013, 卷号: 6, 期号: 4, 页码: 1543-1553
Authors:
Liu, Xingfang
;
Sun, Guosheng
;
Liu, Bin
;
Yan, Guoguo
;
Guan, Min
;
Zhang, Yang
;
Zhang, Feng
;
Chen, Yu
;
Dong, Lin
;
Zheng, Liu
;
Liu, Shengbei
;
Tian, Lixin
;
Wang, Lei
;
Zhao, Wanshun
;
Zeng, Yiping
Adobe PDF(502Kb)
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View/Download:1245/294
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Submit date:2013/08/27
Development of vertical 32" LPCVD system for fast epitaxial growth on 4H-SiC
期刊论文
Materials Science Forum, 2012, 卷号: 717-720, 页码: 105-108
Authors:
Zhao, Wanshun
;
Sun, Guosheng
;
Wu, Hailei
;
Yan, Guoguo
;
Zheng, Liu
;
Dong, Lin
;
Wang, Lei
;
Liu, Xingfang
;
Yang, Lijun
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View/Download:734/175
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Submit date:2013/04/22
Infrared reflectance study of 3C-SiC epilayers grown on silicon substrates
期刊论文
Journal of Physics D: Applied Physics, 2012, 卷号: 45, 期号: 24, 页码: 245102
Authors:
Dong, Lin
;
Sun, Guosheng
;
Zheng, Liu
;
Liu, Xingfang
;
Zhang, Feng
;
Yan, Guoguo
;
Zhao, Wanshun
;
Wang, Lei
;
Li, Xiguang
;
Wang, Zhanguo
Adobe PDF(654Kb)
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View/Download:703/154
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Submit date:2013/04/22
High-Performance 4H-SiC-Based Metal-Insulator-Semiconductor Ultraviolet Photodetectors With SiO(2) and Al(2)O(3)/SiO(2) Films
期刊论文
IEEE ELECTRON DEVICE LETTERS, 2011, 卷号: 32, 期号: 12, 页码: 1722-1724
Authors:
Zhang F (Zhang Feng)
;
Sun GS (Sun Guosheng)
;
Huang HL (Huang Huolin)
;
Wu ZY (Wu Zhengyun)
;
Wang L (Wang Lei)
;
Zhao WS (Zhao Wanshun)
;
Liu XF (Liu Xingfang)
;
Yan GG (Yan Guoguo)
;
Zheng L (Zheng Liu)
;
Dong L (Dong Lin)
;
Zeng YP (Zeng Yiping)
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View/Download:876/260
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Submit date:2012/02/22
High-Performance4H-SiC-based metal-insulator-semiconductor ultraviolet photodetectors with SiO2 and Al2O3SiO2 Films
期刊论文
IEEE Electron Device Letters, 2011, 卷号: 32, 期号: 12, 页码: 1722-1724
Authors:
Zhang, Feng
;
Sun, Guosheng
;
Huang, Huolin
;
Wu, Zhengyun
;
Wang, Lei
;
Zhao, Wanshun
;
Liu, Xingfang
;
Yan, Guoguo
;
Zheng, Liu
;
Dong, Lin
;
Zeng, Yiping
;
Zhang, F.(fzhang@semi.ac.cn)
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View/Download:1131/379
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Submit date:2012/06/14
Integrated Circuits
Metal Insulator Boundaries
Photodetectors
Semiconducting Silicon Compounds
Semiconductor Insulator Boundaries
Silicon Carbide
Multi-wafer3C-SiC thin films grown on Si(100) in a vertical HWLPCVD reactor
期刊论文
Journal of Semiconductors, 2011, 卷号: 32, 期号: 6, 页码: 63001
Authors:
Yan, Guoguo
;
Sun, Guosheng
;
Wu, Hailei
;
Wang, Lei
;
Zhao, Wanshun
;
Liu, Xingfang
;
Zeng, Yiping
;
Wen, Jialiang
;
Yan, G.(ggyan@semi.ac.cn)
Adobe PDF(578Kb)
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View/Download:1165/326
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Submit date:2012/06/14
Chemical Vapor Deposition
Deposition
Electric Resistance
Epitaxial Growth
Film Growth
Sheet Resistance
Silicon Carbide
Silicon Wafers
4H-SiC同质外延层中的扩展缺陷研究
期刊论文
半导体光电, 2011, 卷号: 32, 期号: 3, 页码: 359-362
Authors:
闫果果
;
孙国胜
;
吴海雷
;
王雷
;
赵万顺
;
刘兴昉
;
董林
;
郑柳
;
曾一平
Adobe PDF(482Kb)
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View/Download:1559/433
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Submit date:2012/07/16