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CMOS集成电路用Φ150-200mm外延硅材料 期刊论文
半导体学报, 2001, 卷号: 22, 期号: 12, 页码: 1538
Authors:  王启元;  林兰英;  何自强;  龚义元;  蔡田海;  郁元桓;  何龙珠;  高秀峰;  王建华;  邓惠芳
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