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用氧化多孔硅作牺牲层制备悬空微结构 期刊论文
功能材料与器件学报, 2003, 卷号: 9, 期号: 3, 页码: 319-322
Authors:  宁瑾;  刘忠立;  刘焕章;  葛永才
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Fabrication of Silicon Condenser Microphone Using Oxidized Porous Silicon as Sacrificial Layer 期刊论文
半导体学报, 2003, 卷号: 24, 期号: 5, 页码: 449-453
Authors:  Ning Jin;  Liu Zhongli;  Liu Huanzhang;  Ge Yongcai
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电容式微传声器的性能模拟与优化设计 期刊论文
半导体学报, 2003, 卷号: 24, 期号: 8, 页码: 877-881
Authors:  宁瑾;  刘忠立
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电容式微传声器的制备研究新进展 期刊论文
电子器件, 2002, 卷号: 25, 期号: 1, 页码: 9-13
Authors:  宁瑾;  刘忠立;  赵慧
Adobe PDF(237Kb)  |  Favorite  |  View/Download:723/266  |  Submit date:2010/11/23