SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
电容式微传声器的制备研究新进展
宁瑾; 刘忠立; 赵慧
2002
Source Publication电子器件
Volume25Issue:1Pages:9-13
Abstract本文对近几年来运用单片制备方法,采用硅微机械加工技术(MEMS)工艺研制的电容式微传声器进行了详细描述。通过分析和研究指出,将微传声器与其外围电路集成在单片上可降低器件噪声,采用纹膜或复合膜结构可增加器件的灵敏度,根据具体情况优化电极形状和尺寸,可以在很大程度上提高微传声器的性能。
metadata_83中国科学院半导体研究所微电子中心
Subject Area半导体器件
Indexed ByCSCD
Language中文
CSCD IDCSCD:980978
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/18057
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
宁瑾,刘忠立,赵慧. 电容式微传声器的制备研究新进展[J]. 电子器件,2002,25(1):9-13.
APA 宁瑾,刘忠立,&赵慧.(2002).电容式微传声器的制备研究新进展.电子器件,25(1),9-13.
MLA 宁瑾,et al."电容式微传声器的制备研究新进展".电子器件 25.1(2002):9-13.
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