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title: 制造厚膜氮化物材料的氢化物气相外延装置
author: 刘喆;  王军喜;  钟兴儒;  李晋闽;  曾一平;  段瑞飞;  马平;  魏同波;  林郭强
metadata_47: 2006-12-20
Appears in Collections:半导体研究所机构知识库_专利

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刘喆;王军喜;钟兴儒;李晋闽;曾一平;段瑞飞;马平;魏同波;林郭强,制造厚膜氮化物材料的氢化物气相外延装置 ,200510076325 ,20050614
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