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title: 一种制备金属锆薄膜材料的方法
author: 杨少延;  柴春林;  刘志凯;  陈涌海;  陈诺夫;  王占国
metadata_47: 2006-7-5
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
杨少延;柴春林;刘志凯;陈涌海;陈诺夫;王占国,一种制备金属锆薄膜材料的方法,200410101885,20041230
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