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title: 可提高砷化铝氧化均匀性的外延片承载装置
author: 佟存柱;  牛智川;  韩勤;  杜云;  吴荣汉
metadata_47: 2006-5-3
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
佟存柱;牛智川;韩勤;杜云;吴荣汉,可提高砷化铝氧化均匀性的外延片承载装置 ,CN200420009923.5,20041202
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