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title: 自适应柔性层制备无裂纹硅基Ⅲ族氮化物薄膜的方法
author: 吴洁君;  黎大兵;  陆沅;  韩修训;  李杰民;  王晓辉;  刘祥林;  王占国
metadata_47: 2005-12-28
Appears in Collections:半导体研究所机构知识库_专利

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吴洁君;黎大兵;陆沅;韩修训;李杰民;王晓辉;刘祥林;王占国,自适应柔性层制备无裂纹硅基Ⅲ族氮化物薄膜的方法 ,CN200410048229.9,20040615
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