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一种具有平面型发射阴极的纳米真空三极管及其制作方法
侍铭; 陈平; 赵德刚; 朱建军; 刘宗顺; 江德生
Rights Holder中国科学院半导体所
Date Available2016-08-30
Country中国
Subtype发明
Subject Area光电子学
Application Date2014-09-26
Application NumberCN201410504100.8
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27303
Collection光电子研究发展中心
Recommended Citation
GB/T 7714
侍铭,陈平,赵德刚,等. 一种具有平面型发射阴极的纳米真空三极管及其制作方法.
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