SEMI OpenIR  > 中科院半导体照明研发中心
蓝宝石图形衬底的制备方法
段瑞飞; 季安; 伊晓燕; 王莉; 樊中朝; 郭金霞; 潘岭峰; 黄亚军; 赵冀; 李镇
Rights Holder中国科学院半导体研究所
Date Available2013-07-24
Country中国
Subtype发明
Subject Area半导体器件
Application Date2013-04-22
Application NumberCN201310141878.2
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25644
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
段瑞飞,季安,伊晓燕,等. 蓝宝石图形衬底的制备方法.
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