SEMI OpenIR  > 半导体超晶格国家重点实验室
采用AFM纳米压印图形衬底生长定位量子点的MBE方法
査国伟; 牛智川; 倪海桥; 尚向军; 贺振宏
Rights Holder中国科学院半导体研究所
Date Available2014-02-19
Country中国
Subtype发明
Subject Area半导体物理
Application Date2013-11-21
Application NumberCN201310594632.0
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25450
Collection半导体超晶格国家重点实验室
Recommended Citation
GB/T 7714
査国伟,牛智川,倪海桥,等. 采用AFM纳米压印图形衬底生长定位量子点的MBE方法.
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