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SEMI OpenIR  > 中国科学院半导体研究所（2009年前）
双面抛光机
朱蓉辉; 赵冀; 惠峰; 卜俊鹏; 郑红军
2007-09-19
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2006-03-13
Language中文
Application NumberCN200610057412.4
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/4135
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 朱蓉辉,赵冀,惠峰,等. 双面抛光机[P]. 2007-09-19.
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CN200610057412.4.pdf（324KB） 限制开放--Application Full Text
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