| MOCVD设备的石墨托盘 | |
| 纪攀峰; 孔庆峰; 王文军; 胡强; 马平; 曾一平; 王军喜; 李晋闽 | |
| Rights Holder | 中国科学院半导体所 |
| Date Available | 2016-08-30 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2014-12-24 |
| Application Number | CN201410818493.X |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/27276 |
| Collection | 中科院半导体照明研发中心 |
| Recommended Citation GB/T 7714 | 纪攀峰,孔庆峰,王文军,等. MOCVD设备的石墨托盘. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| MOCVD设备的石墨托盘.pdf（327KB） | 限制开放 | License | Application Full Text | |||
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