MOCVD设备的石墨托盘 | |
纪攀峰; 孔庆峰; 王文军; 胡强; 马平; 曾一平; 王军喜; 李晋闽 | |
Rights Holder | 中国科学院半导体所 |
Date Available | 2016-08-30 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体器件 |
Application Date | 2014-12-24 |
Application Number | CN201410818493.X |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/27276 |
Collection | 中科院半导体照明研发中心 |
Recommended Citation GB/T 7714 | 纪攀峰,孔庆峰,王文军,等. MOCVD设备的石墨托盘. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
MOCVD设备的石墨托盘.pdf(327KB) | 限制开放 | License | Application Full Text |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment