SEMI OpenIR  > 中科院半导体照明研发中心
MOCVD设备的石墨托盘
纪攀峰; 孔庆峰; 王文军; 胡强; 马平; 曾一平; 王军喜; 李晋闽
Rights Holder中国科学院半导体所
Date Available2016-08-30
Country中国
Subtype发明
Subject Area半导体器件
Application Date2014-12-24
Application NumberCN201410818493.X
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27276
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
纪攀峰,孔庆峰,王文军,等. MOCVD设备的石墨托盘.
Files in This Item:
File Name/Size DocType Version Access License
MOCVD设备的石墨托盘.pdf(327KB) 限制开放LicenseApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[纪攀峰]'s Articles
[孔庆峰]'s Articles
[王文军]'s Articles
Baidu academic
Similar articles in Baidu academic
[纪攀峰]'s Articles
[孔庆峰]'s Articles
[王文军]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[纪攀峰]'s Articles
[孔庆峰]'s Articles
[王文军]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.