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High quality microcrystalline Si films by hydrogen dilution profile 会议论文
THIN SOLID FILMS, BRATISLAVA, SLOVAKIA, SEP 15-20, 2002
Authors:  Gu, JH (Gu, Jinhua);  Zhu, MF (Zhu, Meifang);  Wang, LJ (Wang, Liujiu);  Liu, FZ (Liu, Fengzhen);  Zhou, BQ (Zhou, Bingqing);  Ding, K (Ding, Kun);  Li, GH (Li, Guohua);  Zhu, MF, Chinese Acad Sci, Grad Sch, Coll Phys Sci, POB 4588, Beijing 100049, Peoples R China. 电子邮箱地址: mfzhu@gucas.ac.cn
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Microcrystalline Si Thin Film