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High quality microcrystalline Si films by hydrogen dilution profile 期刊论文
THIN SOLID FILMS, 2006, 卷号: 515, 期号: 2, 页码: 452-455
Authors:  Gu JH (Gu Jinhua);  Zhu MF (Zhu Meifang);  Wang LJ (Wang Liujiu);  Liu FZ (Liu Fengzhen);  Zhou BQ (Zhou Bingqing);  Ding K (Ding Kun);  Li GH (Li Guohua);  Zhu, MF, Chinese Acad Sci, Grad Sch, Coll Phys Sci, POB 4588, Beijing 100049, Peoples R China. E-mail: mfzhu@gucas.ac.cn
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Microcrystalline Si Thin Film  Hydrogen Dilution Profiling  Incubation Layer  Uniformity  Chemical-vapor-deposition  Thin  Alloys  Cvd  
High quality microcrystalline Si films by hydrogen dilution profile 会议论文
THIN SOLID FILMS, BRATISLAVA, SLOVAKIA, SEP 15-20, 2002
Authors:  Gu, JH (Gu, Jinhua);  Zhu, MF (Zhu, Meifang);  Wang, LJ (Wang, Liujiu);  Liu, FZ (Liu, Fengzhen);  Zhou, BQ (Zhou, Bingqing);  Ding, K (Ding, Kun);  Li, GH (Li, Guohua);  Zhu, MF, Chinese Acad Sci, Grad Sch, Coll Phys Sci, POB 4588, Beijing 100049, Peoples R China. 电子邮箱地址: mfzhu@gucas.ac.cn
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Microcrystalline Si Thin Film  
HWCVD低温制备器件质量的微晶硅薄膜 学位论文
, 北京: 中国科学院半导体研究所, 2003
Authors:  汪六九
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