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热退火γ-Al_2O_3/Si异质结构薄膜质量改进 期刊论文
半导体学报, 2002, 卷号: 23, 期号: 11, 页码: 1178-1181
Authors:  谭利文;  王俊;  王启元;  郁元桓;  刘忠立;  邓惠芳;  王建华;  林兰英
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