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Homoepitaxial growth and MOS structures of 4H-SiC on off oriented n-type (0001)Si-faces 会议论文
2004 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, Beijing, PEOPLES R CHINA, OCT 18-21, 2004
作者:  Sun, GS;  Ning, J;  Zhang, YX;  Gao, X;  Wang, L;  Zhao, WS;  Zeng, YP;  Li, JM;  Sun, GS, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.
Adobe PDF(201Kb)  |  收藏  |  浏览/下载：1354/208  |  提交时间：2010/03/29
4h-sic  Lpcvd Homoepitaxial Growth  Thermal Oxidization  Mos Structures  Hot-wall Cvd  
Fabrication of 1.3 mu m Si-based MEMS tunable optical filter 会议论文
MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS, 4928, SHANGHAI, PEOPLES R CHINA, OCT 17-18, 2002
作者:  Zuo YH;  Huang CJ;  Cheng BW;  Mao RW;  Luo LP;  Gao JH;  Bai YX;  Wang LC;  Yu JZ;  Wang QM;  Zuo YH Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect Beijing 100083 Peoples R China.
Adobe PDF(158Kb)  |  收藏  |  浏览/下载：1429/342  |  提交时间：2010/10/29
Fabry-perot  Tunable Filter  Surface Micromaching  Cavity  
Photoluminescence characteristics of GaAs/AlGaAs quantum dot arrays fabricated by dry and dry-wet etching 会议论文
PHOTONICS TECHNOLOGY INTO THE 21ST CENTURY: SEMICONDUCTORS, MICROSTRUCTURES, AND NANOSTRUCTURES, 3899, SINGAPORE, SINGAPORE, DEC 01-03, 1999
作者:  Wang XH;  Song AM;  Liu J;  Cheng WC;  Li GH;  Li CF;  Li YX;  Yu JZ;  Wang XH Chinese Acad Sci Inst Semicond Natl Lab Superlattices & Microstruct Beijing 100083 Peoples R China.
Adobe PDF(275Kb)  |  收藏  |  浏览/下载：1332/278  |  提交时间：2010/10/29
Gaas/algaas  Quantum Dot Array  Etching Method  Photoluminescence  Wires