高级检索   注册
SEMI OpenIR  > 中国科学院半导体研究所(2009年前)  > 会议论文

题名: High quality microcrystalline Si films by hydrogen dilution profile
作者: Gu, JH (Gu, Jinhua);  Zhu, MF (Zhu, Meifang);  Wang, LJ (Wang, Liujiu);  Liu, FZ (Liu, Fengzhen);  Zhou, BQ (Zhou, Bingqing);  Ding, K (Ding, Kun);  Li, GH (Li, Guohua)
出版日期: 2006
会议日期: SEP 15-20, 2002
摘要: Novel hydrogen dilution profiling (HDP) technique was developed to improve the uniformity in the growth direction of mu c-Si:H thin films prepared by hot wire chemical vapor deposition (HWCVD). It was found that the high H dilution ratio reduces the incubation layer from 30 nm to less than 10 nm. A proper design of hydrogen dilution profiling improves the uniformity of crystalline content, X-c, in the growth direction and restrains the formation of micro-voids as well. As a result the compactness of mu c-Si:H films with a high crystalline content is enhanced and the stability of mu c-Si:H thin film against the oxygen diffusion is much improved. Meanwhile the HDP mu c-Si:H films exhibit the low defect states. The high nucleation density from high hydrogen dilution at early stage is a critical parameter to improve the quality of mu c-Si:H films. (c) 2006 Published by Elsevier B.V.
会议名称: 12th International Conference on Thin Films
会议文集: THIN SOLID FILMS
专题: 中国科学院半导体研究所(2009年前)_会议论文

条目包含的文件

文件 大小格式
2373.pdf336KbAdobe PDF 联系获取全文


许可声明:条目相关作品遵循知识共享协议(Creative Commons)。


推荐引用方式:
Gu, JH (Gu, Jinhua); Zhu, MF (Zhu, Meifang); Wang, LJ (Wang, Liujiu); Liu, FZ (Liu, Fengzhen); Zhou, BQ (Zhou, Bingqing); Ding, K (Ding, Kun); Li, GH (Li, Guohua) .High quality microcrystalline Si films by hydrogen dilution profile .见:ELSEVIER SCIENCE SA .THIN SOLID FILMS,PO BOX 564, 1001 LAUSANNE, SWITZERLAND ,OCT 25 2006,515 (2): 452-455
个性服务
 推荐该条目
 保存到收藏夹
 查看访问统计
 Endnote导出
Google Scholar
 Google Scholar中相似的文章
 [Gu, JH (Gu, Jinhua)]的文章
 [Zhu, MF (Zhu, Meifang)]的文章
 [Wang, LJ (Wang, Liujiu)]的文章
CSDL跨库检索
 CSDL跨库检索中相似的文章
 [Gu, JH (Gu, Jinhua)]的文章
 [Zhu, MF (Zhu, Meifang)]的文章
 [Wang, LJ (Wang, Liujiu)]的文章
Scirus search
 Scirus中相似的文章
Social Bookmarking
  Add to CiteULike  Add to Connotea  Add to Del.icio.us  Add to Digg  Add to Reddit 
所有评论 (0)
暂无评论

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。

 

 

Valid XHTML 1.0! 版权所有 © 2007-2012  中国科学院半导体研究所  -反馈
系统开发与技术支持:中国科学院国家科学图书馆兰州分馆(信息系统部)
本系统基于 MIT 和 Hewlett-Packard 的 DSpace 软件开发