Design and Fabrication of Low-microwave loss Coplannar Waveguide and precise V groove on Silicon Substrate for Optoelectronic Packaging - art. no. 601938

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	Design and Fabrication of Low-microwave loss Coplannar Waveguide and precise V groove on Silicon Substrate for Optoelectronic Packaging - art. no. 601938
	Yang, H; Zhu, HL; Xie, HY; Zhao, LJ; Zhou, F; Wang, W; Yang, H, Chinese Acad Sci, Inst Semicond, Natl Res Ctr Optoelect Technol, Beijing 100083, Peoples R China.
	2005
Conference Name	Conference on Passive Components and Fiber-Based Devices II
Source Publication	Passive Components and Fiber-based Devices II丛书标题: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
Pages	Pt 1 and 2 6019: U811-U818 Part 1&2
Conference Date	NOV 07-10, 2005
Conference Place	Shanghai, PEOPLES R CHINA
Publication Place	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
Publisher	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	0-8194-6050-8
metadata_83	chinese acad sci, inst semicond, natl res ctr optoelect technol, beijing 100083, peoples r china
Abstract	Optoelectronic packaging has become a most important factor that influences the final performance and cost of the module. In this paper, low microwave loss coplanar waveguide(CPW) on high resistivity silicon(HRS) and precise V groove in silicon substrate were successfully fabricated. The microwave attenuation of the CPW made on HRS with the simple process is lower than 2 dB/cm in the frequency range of 0 similar to 26GHz, and V groove has the accuracy in micro level and smooth surface. These two techniques built a good foundation for high frequency packaging and passive coupling of the optoelectronic devices. Based on these two techniques, a simple high resistivity silicon substrate that integrated V groove and CPW for flip-chip packaging of lasers was completed. It set a good example for more complicate optoelectronic packaging.
Keyword	Coplanar Waveguide (Cpw) v Groove Low Microwave Loss Passive Coupling Optoelectronic Packaging
Subject Area	光电子学
Indexed By	CPCI-S
Language	英语
Document Type	会议论文
Identifier	http://ir.semi.ac.cn/handle/172111/9908
Collection	中国科学院半导体研究所（2009年前）
Corresponding Author	Yang, H, Chinese Acad Sci, Inst Semicond, Natl Res Ctr Optoelect Technol, Beijing 100083, Peoples R China.
Recommended Citation GB/T 7714	Yang, H,Zhu, HL,Xie, HY,et al. Design and Fabrication of Low-microwave loss Coplannar Waveguide and precise V groove on Silicon Substrate for Optoelectronic Packaging - art. no. 601938[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2005:Pt 1 and 2 6019: U811-U818 Part 1&2.

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