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title: 一种碳化硅外延生长用加热器旋转装置
author: 孙国胜;  王雷;  赵万顺;  李家业;  赵永梅;  刘兴昉
metadata_47: 2008-1-2
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
孙国胜;王雷;赵万顺;李家业;赵永梅;刘兴昉,一种碳化硅外延生长用加热器旋转装置,CN200720103516.4,20070207
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