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title: 用于氮化物外延生长的纳米级图形衬底的制作方法
author: 闫发旺;  高海永;  樊中朝;  李晋闽;  曾一平;  王国宏;  张会肖;  王军喜;  张扬
metadata_47: 2009-2-25
Appears in Collections:半导体研究所机构知识库_专利

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闫发旺;高海永;樊中朝;李晋闽;曾一平;王国宏;张会肖;王军喜;张扬,用于氮化物外延生长的纳米级图形衬底的制作方法 ,CN200710120612.4,20070822
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