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title: 一种具有薄氮化铪可协变层的硅基可协变衬底材料
author: 杨少延;  范海波;  李成明;  陈涌海;  王占国
metadata_47: 2008-7-2
Appears in Collections:半导体研究所机构知识库_专利

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杨少延;范海波;李成明;陈涌海;王占国,一种具有薄氮化铪可协变层的硅基可协变衬底材料 ,200610169749,20061228
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