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title: 用于MEMS器件的大面积3C-SiC薄膜的制备方法
author: 刘兴昉;  孙国胜;  李晋闽;  赵永梅;  王雷;  赵万顺;  李家业;  曾一平
metadata_47: 2008-3-26
Appears in Collections:半导体研究所机构知识库_专利

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刘兴昉;孙国胜;李晋闽;赵永梅;王雷;赵万顺;李家业;曾一平,用于MEMS器件的大面积3C-SiC薄膜的制备方法 ,200610126999,20060918
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