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title: 在硅衬底上生长无裂纹氮化镓薄膜的方法
author: 刘喆;  李晋闽;  王军喜;  王晓亮;  王启元;  刘宏新;  王俊;  曾一平
metadata_47: 2007-5-23
Appears in Collections:半导体研究所机构知识库_专利

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刘喆;李晋闽;王军喜;王晓亮;王启元;刘宏新;王俊;曾一平,在硅衬底上生长无裂纹氮化镓薄膜的方法 ,200510086899,20051117
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