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title: 利用缓冲层在硅衬底上生长氧化锌薄膜的方法
author: 沈文娟;  曾一平;  王启元;  王俊
metadata_47: 2006-10-4
Appears in Collections:半导体研究所机构知识库_专利

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沈文娟;曾一平;王启元;王俊,利用缓冲层在硅衬底上生长氧化锌薄膜的方法,200510062744,20050328
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