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title: 一种制备三元高K栅介质材料的方法
author: 李艳丽;  陈诺夫;  刘立峰;  尹志刚;  杨菲;  柴春林
metadata_47: 2006-5-31
Appears in Collections:半导体研究所机构知识库_专利

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李艳丽;陈诺夫;刘立峰;尹志刚;杨菲;柴春林,一种制备三元高K栅介质材料的方法,200410009860,20041125
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