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title: 制备绝缘体上锗硅薄膜材料的方法
author: 刘超;  高兴国;  李建平;  曾一平
metadata_47: 2006-5-31
Appears in Collections:半导体研究所机构知识库_专利

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刘超;高兴国;李建平;曾一平,制备绝缘体上锗硅薄膜材料的方法,200410009861,20041125
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