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title: 液相外延水平生长晶体薄膜用的容器
author: 钟兴儒;  徐自亮;  田金法;  吴金良;  陈诺夫
metadata_47: 2000-9-20
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
钟兴儒;徐自亮;田金法;吴金良;陈诺夫,液相外延水平生长晶体薄膜用的容器 ,CN99248214.3,19991010
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