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title: 在硅衬底上低温生长高结晶质量氧化锌薄膜的方法
author: 沈文娟;  曾一平;  王启元;  王俊
metadata_47: 2006-3-1
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
沈文娟;曾一平;王启元;王俊,在硅衬底上低温生长高结晶质量氧化锌薄膜的方法 ,CN200410056958.9,20040823
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