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title: 降低磷离子注入(0001)取向的4H-碳化硅电阻率的方法
author: 高欣;  孙国胜;  李晋闽;  王雷;  赵万顺
metadata_47: 2006-1-4
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
高欣;孙国胜;李晋闽;王雷;赵万顺,降低磷离子注入(0001)取向的4H-碳化硅电阻率的方法 ,CN200410049770.1,20040628
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