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title: 生长高结晶质量氮化铟单晶外延膜的方法
author: 肖红领;  王晓亮;  王军喜;  张南红;  刘宏新;  曾一平
metadata_47: 2005-12-7
Appears in Collections:半导体研究所机构知识库_专利

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肖红领;王晓亮;王军喜;张南红;刘宏新;曾一平,生长高结晶质量氮化铟单晶外延膜的方法 ,CN200410046194.5,20040602
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