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title: 硅基光子集成的器件及制作方法
author: 黄昌俊;  邓晓清;  成步文;  王红杰;  杨沁清;  余金中;  胡雄伟;  王启明
metadata_47: 2003-11-5
Appears in Collections:半导体研究所机构知识库_专利

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黄昌俊;邓晓清;成步文;王红杰;杨沁清;余金中;胡雄伟;王启明,硅基光子集成的器件及制作方法 ,CN02118525.5,20020426
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