SEMI OpenIR  > 中科院半导体照明研发中心
硅基悬空结构微纳热电器件研究
马哲
Subtype博士
2020-05
Degree Grantor中国科学院大学
Place of Conferral中国科学院半导体研究所
Language中文
Date Available2020-05
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29872
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
马哲. 硅基悬空结构微纳热电器件研究[D]. 中国科学院半导体研究所. 中国科学院大学,2020.
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2020069-公开-马哲-博士-硅基悬(7676KB)学位论文 限制开放CC BY-NC-SAApplication Full Text
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